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Vacuum plasma cleaning machine

Vacuum plasma cleaner: the gas is ionized into plasma state through the excitation power supply. The plasma acts on the product surface to clean the pollutants on the product surface, improve the surface activity and enhance the adhesion performance. Plasma cleaning is a new, environment-friendly, efficient and stable surface treatment method.

Model:SPV-60

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Product Description

Equipment principle:

In the vacuum chamber, high-energy plasma is generated by RF power supply under certain pressure.

Product features:

The product placement fixture is flexible and changeable, which can adapt to irregular products

The horizontal electrode design can meet the processing requirements of soft products.

Low energy and gas consuming products.

Convenient way of retracting and releasing the board

Integrated vacuum system with small floor area

Reasonable plasma reaction space makes the treatment more uniform

The integrated control system design makes the operation more convenient

Configuration list


Item	Name	Description		Unit	Qty
1	Main machine	Machine size:900×1600×900mm（W×H×L）		pcs	1
2	Vacuum Chamber	375×375×430mm（W×H×L）		pcs	1
3	Power	RF power supply	Power supply	set	1
3	Power	Frequency：13.56MHz；Power:0~600W Automatic vacuum capacitor matching	Frequency：40KHz；0~1000W;	set	1
4	PLC	S7-200		pcs	1
5	Touch screen	MT6071iE		pcs	1
6	Flowmeter	Britain wawick		pcs	2
7	Vacuum pump set	40m3/h		pcs	1
8	Vacuum gauge	INFICON		pcs	1
9	Instructions	SPV-60 USER MANUAL		pcs	1

Product function:

Surface activation

1.Improve the surface energy and realize the effective combination of difficult bonding materials

2.Improve the wettability of glue or other liquids on the product surface

Surface coarsening

1.The plasma bombards the product surface to produce nano micro etching
Tightness: military grade welding, strong tightness and low leakage rate

1.Sustainability: unique patent / imported power supply, strong stability

2.Flexibility: various options are available for each component

3.Diversity: provide a variety of automation solutions according to the needs of the industry

4.Use cost: low energy and gas consumption and low use cost

5.Control software: unique patented software, which can be customized according to customer needs

Industry application:

1.Mobile phone industry: TP, middle frame and back cover surface cleaning and activation

2.PCB / FPC Industry: drilling dirt and surface cleaning in the hole, coarsening and cleaning of coverlay surface

3.Semiconductor industry: semiconductor packaging, camera module, LED packaging, BGA packaging, wire bond pretreatment

4.Ceramics: pre-treatment of packaging and dispensing

5.Surface roughening etching: Pi surface roughening, PPS etching, semiconductor wafer PN junction removal, ITO film etching

6.Plastic materials: Teflon Teflon surface activation, ABS surface activation, and cleaning activation of other plastic materials

7.Surface cleaning before ITO coating

Vacuum plasma cleaning machineproduct series:

Specification:
Model	SPV-60	SPV-100		SPV-150		SPV-200
Machine size: (LWH)mm	9001600900	90017501000		102017201120		135017001200
Power	Radio frequency：0-1000W；Intermediate frequency：0-2000W
Frequency	Radio frequency：13.56MHz；Intermediate frequency：40KHz
PCB size	345*344mm		420*411mm		587*470mm		575*510mm
Spacing	22.5mm				34mm
Pump set	Two stage vane pump:40m³/h		Two stage vane pump:60m³/h		Two stage / roots pump + single stage		Roots pump + single stage
Process gas	Customizable (argon, oxygen, nitrogen, hydrogen, carbon tetrafluoride)